thin films were deposited on conducting glass substrates via successive ionic layer absorption and reaction method using ethanol as solvent,  and  as cationic precursor ions and  as sulfur source. The mechanism of the formation process was discussed and the effects of the [cuper (II)]/[indium (III)] ratio and annealing temperature on the properties of  film were studied. The morphology of the samples was observed by SEM and X-ray. The results show that the  films with suitable condition (cuper (II)]/[indium (III) = 1.25, annealed at 500°C) crystallized well, and the typical XRD pattern shows a chalcopyrite structure.